Product
Description:
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The shims
are provided in a variety of size and thickness, to accommodate all wafer
diameters, material thicknesses, and polishing removal requirements. The
different shim thicknesses allow for a broader range of material thickness
to be polished with the same template, thus reducing the need for many
templates with different cavity depths. This is accomplished by simply
using a different thickness of shim to adjust cavity depth for a different
thickness of material.
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