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SEM & FIB¬ÛÃöªþÄݳ]³Æ¤ÎÀ³¥Î¬ã°Q·| ijµ{²Ó¶µ
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9:30
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Coffee
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10:00
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FIB Strategies for TEM sample Preparation (H-bar,
INLO - in situ lift-out , EXLO - ex situ lift-out)
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10:30
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In situ lamella cutting methods, advantages
and disadvantages of each
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11:00
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Coffee Break
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11:30
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Reorienting the lamella for Plan-View TEM and Sideways Milling
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12:00
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Lift-Out Tips and Tricks
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12:30
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Backside Thinning and grid attach Strategies (Short-Cut ¡V ex-situ
grid attach, double lift-out and more)
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13:00
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Lunch
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14:00
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Preparation for tomography
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14:30
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Gas Injection System ¡V SEM
& FIB Applications:
„«Nanowire positioning
„«Plasmonic nanostructure & nanofabrication
„«Device assembly
„«e-beam lithography (ion beam as well)
„«electrical test structure
„«He microscope ¡V IBID
„«ALD ¡V Atomic Layer Deposition
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15:30
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Sample transfer system
Sensitive Sample Transfer between microscopes
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16:00
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Coffee w/
Q&A
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1.¹q¶l³ø¦W¡G¶ñ¼g§¹²¦½Ð¦^¶Ç¦Ü¹q¶l«H½c penny_vtek@mail2000.com.tw
2.¶Ç¯u³ø¦W¡G04-25205797±i¤p©j¦¬
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