Introduction

The microprocessor-based Evactron® E25 simplifies plasma operation with factory-programmed settings stored in its internal memory, reducing the need for extensive operator training. The compact, tabletop controller features embedded software that regulates a leak valve and controls chamber pressure via a MicroPirani™ gauge. It also manages RF power and includes a built-in clock for timing downstream plasma cleaning and nitrogen purging cycles. Operational data and fault events are logged by the microprocessor.

Users can adjust parameters using the Encoder Knob, with menu options displayed on the front panel. The Enable/Disable Button activates the system for plasma cleaning. Additionally, the RS232 interface allows communication of key parameters—such as RF power (forward and reflected), vacuum levels, and operational/fault logs—to a remote computer using the provided Graphical User Interface (GUI).