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iAS Large FOV Scanner
iStar develops The Innovative Equipment in the fields of Semiconductor, Pan-semiconductor, Precision Manufacturing, New energy and Biomedical fields ...
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iAS series products are full FOV scanner independently developed by iSTAR, for high-end display applications, IC substrate, and advanced packaging, and applications such as large FOV exposure of MicroLED, IC substrate and Fan-out.
| Model | iAS3000 | iAS5000 | iAS9000 |
|---|---|---|---|
| Max. Resolution | 1μm | ||
| Max. Substrate Size | Φ300mm | 515x510mm | IC Substrate |
| Applications | Fan-out | 730x920mm | Micro-LED |
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