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Ex-situ Lift Off System

In 2010, Lucille revisited the ex situ lift out technique and developed added flexibility with a patented* grid design and method named EXpressLO™.

Introduction

Samples can be directly EXLO (extra-cavity removal and TEM sample preparation) from 6”~12” wafers, which is faster and more accurate than in-situ stripping to prepare samples for TEM analysis.